SEMIPROBE MA-9100 Wafer Probe System
Product Information
Specifications:
- Rapid Align manual wafer stage with coarse and fine stage travel
- 200 mm HF chuck with vacuum holes
- Two auxiliary chucks for calibration substrates
- Large platen with stainless steel skin
- Removable front wedge and linear lift
- Microscope post with 100 mm of linear X, Y microscope movement
- Stereo zoom microscope with a long working distance and field of view
- CCTV system
- Two MA-9100 manual manipulators with west/east HF arms
- Two MA-9000 manual manipulators with adjustable probe arm faceplate, coaxial arms
- Variety of tungsten probe tips for DC bias, HF probe tips, GGB Industries calibration substrates, Junkosha high-frequency cables
Product Usage Instructions
- Wafer Stage Alignment:
Use the Rapid Align manual wafer stage to align the wafer with coarse and fine stage travel for precise positioning. - Chuck Setup:
Place the 200 mm HF chuck with vacuum holes on the stage and use the auxiliary chucks for calibration substrates when needed. - Microscope and Manipulators:
Utilize the microscope post with linear X, and Y movement for detailed inspection. Use the stereo zoom microscope and CCTV system for enhanced visualization. Operate the manual manipulators for precise handling of components. - Probe Tips and Cables:
Select the appropriate tungsten probe tips for DC bias or HF applications. Ensure proper calibration using GGB Industries calibration substrates and Junkosha high-frequency cables.
FAQ:
Q: Where can I find more information about the company?
A: You can visit our website at www.semiprobe.com or contact us at 276 East Allen Street, Winooski, VT 05404, US for further details.
Specific Requirements
The customer was looking for a general-purpose 200 mm manual high frequency (HF) wafer probe system that allowed for the measurement of whole wafers up to 200 mm and individual parts mounted on tape over a variety of frequency ranges. They wanted to use individual manual manipulators with standard west/east HF probe arms that could handle GS, SG, GSG, differential, and multi-contact wedges operating from DC to 40 GHz. In addition, they needed the ability to add manual manipulators for DC bias and a probe card holder for probe cards.
SemiProbe Solution
- PS4L M-8 manual 200 mm probe system:
- Rapid Align manual wafer stage with coarse and fine stage travel
- 200 mm HF chuck with vacuum holes, two auxiliary chucks for calibration substrates
- Large platen with stainless steel skin, removable front wedge, and linear lift
- Microscope:
- Microscope post with 100 mm of linear X, Y microscope movement
- Stereo zoom microscope with a long working distance and field of view
- CCTV system
- Manipulators with magnetic bases:
- Two MA-9100 manual manipulators with west/east HF arms
- Two MA-9000 manual manipulators with adjustable probe arm faceplate, coaxial arms
- Variety of tungsten probe tips for DC bias, HF probe tips, GGB Industries calibration substrates, Junkosha high-frequency cables
- 4.5” probe card holder
Contact Information
- 276 East Allen Street Winooski, VT 05404, US
- www.semiprobe.com.
Documents / Resources
 |
SEMIPROBE MA-9100 Wafer Probe System [pdf] Instruction Manual MA-9100 Wafer Probe System, MA-9100, Wafer Probe System, Probe System |
References
-
Semiprobe - Semiconductor Testing Solutions - Probe Systems
-
Semiprobe - Semiconductor Testing Solutions - Probe Systems
- User Manual
